Chinese Scientists Develop High-Performance MEMS Fast Steering Mirror for Satellite Laser Communication

A research team led by Prof. Wu Zhenyu and Dr. Wang Lihao from the Shanghai Institute of Microsystem and Information Technology (SIMIT) has developed a groundbreaking 10-mm aperture piezoelectric MEMS fast steering mirror (FSM) to enhance satellite laser communication. The study, published in Microsystems & Nano Engineering on April 29, addresses critical challenges in achieving high precision, rapid response, and stability for space-based optical links.

By leveraging dual-layer heterogeneous integration and wafer-level bonding technology, the new MEMS FSM overcomes limitations of traditional mechanical mirrors (e.g., bulky size, hysteresis) and existing MEMS solutions (e.g., small aperture, low bandwidth). Its innovative stress-concentrated mechanical design enables ultra-high linearity and dynamic surface deformation of only 2 nanometers under quasi-static driving, meeting stringent requirements for long-distance laser communication. The team highlighted its potential to miniaturize satellite communication terminals and improve reliability in aerospace applications, with plans to further optimize mirror size and closed-loop control.

Source: SIMIT